Shinku/Journal of the Vacuum Society of Japan 48(3) 178-180 2005年 [査読有り]
Tungsten oxide films were deposited on glass substrates (Corning #7059) and polycarbonate substrates by a pulsed laser deposition technique using the both targets WO3 and WO2. At this time, the difference in the transmittance, ΔT, between the anne...
Shinku/Journal of the Vacuum Society of Japan 47(3) 183-186 2004年 [査読有り]
ITO (In2O3 doped with 5 wt% SnO2) films were grown on glass substrates at room temperature by the pulsed laser deposition method using an ArF excimer laser that provides 40 mJ (1.4/cm 2) pulses of 12-16 ns duration at a repetition rate of 10 Hz. A...
Shinku/Journal of the Vacuum Society of Japan 47(3) 224-227 2004年 [査読有り]
β-FeSi2 thin films were deposited on Si (111) by a pulsed laser deposition using a Nd:YAG laser. It was identified from XRD spectra of the as-deposited films that β-FeSi2 (220) and β-FeSi 2 (202) were grown epitaxially on the Si (111) substrate. I...
Shinku/Journal of the Vacuum Society of Japan 47(3) 179-182 2004年 [査読有り]
ZnO doped with 1.5 wt.% Al2O3 (AZO) and 5 wt.% Ga2O3 (GZO) films were deposited on glass substrates by pulsed laser deposition method. In all experiments, repetition rates of 10 Hz, the energy density of 2 J/cm2, and an ablation time of 20 min irr...
Shinku/Journal of the Vacuum Society of Japan 47(5) 396-399 2004年 [査読有り]
β-FeSi2 thin films were grown by pulsed laser deposition method using an ArF excimer laser. The as-deposited films were annealed by the same laser after the films were grown. It was found that Si element was diffusible in the films and the crystal...
Approximately 150 nm-thick Al-doped zinc oxide (AZO) films with c-axis orientation have been prepared on glass substrates by pulsed laser deposition (PLD) using a split target divided into AZO(Al2O3 : 1 wt.%) and AZO(Al2...
β-FeSi2 thin films were grown on Si(111) substrates by pulsed laser deposition (PLD) method using Nd: YAG Laser (λ = 1064 nm, laser energy = 50 mJ, laser energy density = 1.65 J/cm2, repetition frequency = 10 Hz). In the fabr...